The E5AT stage is a high precision five-axis positioning stage for SEMs, especially designed to allow tilting samples to ±90 deg while allowing unlimited rotation of the sample and keeping the area of interest at the eucentric position.The system consists of a small four-axis substage mounted on a tilting platform. The substage offers a range of 10 mm by 10 mm in the X and Y directions and 3 mm in the Z direction.