Description
![](https://www.ltresources.com.my/wp-content/uploads/2021/08/extrad-p11a.jpeg)
The Prober Shuttle is our latest tool for high-precision in-situ electrical nanoprobing on the 14 nm technology node – and beyond! In order to realise our vision for this product, we developed an ultra-flat three-axis manipulator with unmatched stability and precision – the MM4. The Prober Shuttle can be comprised of up to eight MM4s with the option of an ultra-flat two-axis or three-axis substage.
The entire height of the system is 10 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current imaging modules.
![](https://www.ltresources.com.my/wp-content/uploads/2021/08/extrad-p11b.jpeg)
The Prober Shuttle is our latest tool for high-precision in-situ electrical nanoprobing. In order to realise our vision for this product, we developed an ultra-flat three-axis manipulator with unmatched stability and precision – the MM4. The Prober Shuttle can be comprised of either two or four MM4s with the option of an ultra-flat two-axis or three-axis substage.
The entire height of the system is 9 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current imaging modules.
- About
- Advantages
- Specifications
The PS8 Prober Shuttle is already the most compact and highly integrated nanoprobing system in the market. Nonetheless, we found a way to add positional encoders to the platform. This latest feature enables fast and efficient nanoprobing workflows.
The ability to automatically pre-align the probes is especially important for probing on the most recent technology nodes where beam sensitivity is an issue and thus, very low acceleration voltages are required. Using pre-defined alignment positions, all eight probes can be brought from their individual parked positions into close vicinity to each other at a consistent height above the sample - at the click of a button! This eliminates the tedious pre-alignment task which involved constant corrections of the astigmatism and/or necessitated switching to higher acceleration voltages.
The PS8e utilizes the MM4 ultra-flat three-axis manipulators that exhibit unmatched stability and precision. The entire height of the system is 10 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current Imaging modules, among others.
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Compact & flexible
- Small and practical
- Plug-and-play system with modular components
- Interfacing solutions for most SEM/FIB instruments (including load-lock compatibility)
- Fast setup and removal
- Pioneering cabling technology
- Non-magnetic design for use with immersion lenses
- Lightweight platform is simply placed on your SEMs sample stage
- Can be tilted to FIB angle e.g. for circuit edit or delayering applications
- Easy to retrofit to existing tools
Clear & simple
- Intuitive control interfaces and software
- User-friendly and easy to learn
- Quick and easy probe tip exchange
- Compact, stand-alone electronics
- Effortless work with multiple manipulators
Robust & stable
- Excellent stability
- Low drift (1 nm/min)
- Reliable operation (one year endurance test)
- Virtually insusceptible to vibrations
Fast & precise
- High operating velocity (up to 10 mm/sec)
- Sub-nanometer resolution (0.05 nm)
- No backlash or reversal play
- Extensive working range
- Coarse and fine displacement in one drive
- Fast pre-positioning at the click of a button
Overview
- Total height: 10 mm
- Total width: 140 mm
- Maximum sample area: 20 mm x 20 mm
- Maximum sample height: 20 mm - depending on the sample area and load lock dimensions
- Weight: 200 g + SEM/FIB dovetail
- Clean cable management from flange to rack
- Non-magnetic design
- Ready for 5 nm and beyond
Next generation micromanipulators
A = left / right B = up / down C = in / out
- Operating range: A = 5 mm, B = 90°, C = 5 mm
- Resolution: A < 0.05 nm, B < 0.5 nm, C < 0.05 nm
- Low drift: 1 nm/min
Encoder features
- Park & restore probes with a click of a button
- Drive substage to pre-defined locations
- Fast cycle time
- Automatic tip pre-alignment allows lowkV workflows
Low-capacity, low-current measurements
- Noise: 25 fA @ 1 Hz
- Insulation leakage current: <50 fA/V
- Signal conductor resistance: <5 Ω
- Maximum voltage: 100 V
- Maximum current: 100 mA
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.