Based on the highly successful MM3A-EM micromanipulator, the MM3E exhibits the same compactness, precision, and stability combined with closed-loop positional feedback. This enhancement provides the means to improve the system’s ease of use (e.g. by defining parking and working positions that can be addressed at the click of a button).

The MM3E is fully compatible with virtually any SEM or FIB/SEM on the market. It comes with an intuitive, drag&drop-style control software which provides an easy means for positioning the tool tip in three dimensions inside your SEM or FIB/SEM tool.

The software performs coordinate transformations so that the MM3E behaves as a cartesian system with a reproducibility of a few micrometers. With the optional encoded axial rotation drive, the specimen can be rotated compucentrically in the vicinity of the sample.

Fully encoded axes

  • Positional encoders for all four axes of motion
  • Compu-cartesian motion
  • Intuitive software control

Compact and flexible

  • Small and practical
  • Plug-and-play system with modular components
  • Interfacing solutions for most microscopes
  • Fast setup and removal
  • Effortless work with multiple manipulators
  • Useful plug-in tools

Clear and simple

  • Result-oriented operation and increased throughput
  • Intuitive control interfaces and software
  • User-friendly and easy to learn
  • Quick and easy tool exchange
  • Compact, stand-alone electronics with PC interface
  • Pioneering cabling technology

Robust and stable

  • Compact construction delivers higher resonance frequencies
  • Excellent stability
  • Low drift (1 nm/min)
  • Reliable operation (one year endurance test)
  • Virtually insusceptible to vibrations
  • Fast pre-positioning by hand

Fast and precise

  • No backlash or reversal play
  • Sub-nanometer resolution (0.25 nm)
  • Extensive working range (100 cm³)
  • No "blind axis" like with cartesian systems
  • Integrated coarse and fine displacement in one drive
  • High operating velocity (up to 10 mm/sec)
  • Resolution XY: < 0.5 nm
  • Resolution Z: 0.15 nm
  • Resolution R: < 6 x 10–8 rad
  • Reproducibility XYZ: <2 µm
  • Drift: <1 nm/min
  • compucentric rotation field of view: ~30 µm
  • Probing current range: 10 nA to 100 mA
  • Maximum probing voltage: 100 V
  • Probing signal resistance: 7.0 Ω
  • Temperature range: 273 K to 353 K
  • Mounting: M4 tapped hole


All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.