Micromanipulator

Based on the highly successful MM3A-EM micromanipulator, the MM3E exhibits the same compactness, precision, and stability combined with closed-loop positional feedback. This enhancement provides the means to improve the system’s ease of use (e.g. by defining parking and working positions that can be addressed at the click of a button).

The MM3E is fully compatible with virtually any SEM or FIB/SEM on the market. It comes with an intuitive, drag&drop-style control software which provides an easy means for positioning the tool tip in three dimensions inside your SEM or FIB/SEM tool.

The software performs coordinate transformations so that the MM3E behaves as a cartesian system with a reproducibility of a few micrometers. With the optional encoded axial rotation drive, the specimen can be rotated compucentrically in the vicinity of the sample.

Fully encoded axes

• Positional encoders for all four axes of motion
• Compu-cartesian motion
• Intuitive software control

Compact and flexible

• Small and practical
• Plug-and-play system with modular components
• Interfacing solutions for most microscopes
• Fast setup and removal
• Effortless work with multiple manipulators
• Useful plug-in tools

Clear and simple

• Result-oriented operation and increased throughput
• Intuitive control interfaces and software
• User-friendly and easy to learn
• Quick and easy tool exchange
• Compact, stand-alone electronics with PC interface
• Pioneering cabling technology

Robust and stable

• Compact construction delivers higher resonance frequencies
• Excellent stability
• Low drift (1 nm/min)
• Reliable operation (one year endurance test)
• Virtually insusceptible to vibrations
• Fast pre-positioning by hand

Fast and precise

• No backlash or reversal play
• Sub-nanometer resolution (0.25 nm)
• Extensive working range (100 cm³)
• No "blind axis" like with cartesian systems
• Integrated coarse and fine displacement in one drive
• High operating velocity (up to 10 mm/sec)

• Resolution XY: < 0.5 nm
• Resolution Z: 0.15 nm
• Resolution R: < 6 x 10^–8 rad
• Reproducibility XYZ: <2 µm
• Drift: <1 nm/min
• compucentric rotation field of view: ~30 µm
• Probing current range: 10 nA to 100 mA
• Maximum probing voltage: 100 V
• Probing signal resistance: 7.0 Ω
• Temperature range: 273 K to 353 K
• Mounting: M4 tapped hole

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.