EBAC for Semiconductor Failure Analysis

S. Kleindiek, K. Schock, A. Rummel, M. Zschornack, P. Limbecker, A. Meyer, M. Kemmler, Current imaging, EBIC/EBAC, and electrical probing combined for fast and reliable in situ electrical fault isolation, Microelectronics Reliability, 2016/09/18

Using a compact nanoprobing setup comprising eight probe tips attached to piezo-driven micromanipulators, various techniques for fault isolation are performed on 28 nm samples inside an SEM. The employed techniques […]

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