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Substages

The E5AT stage is a high precision five-axis positioning stage for SEMs, especially designed to allow tilting samples to ±90 deg while allowing unlimited rotation of the sample and keeping the area of interest at the eucentric position.The system consists of a small four-axis substage mounted on a tilting platform. The substage offers a range of 10 mm by 10 mm in the X and Y directions and 3 mm in the Z direction.

 

Eucentric Five Axis Table
Substage with 10 mm travel
Substage with 30 mm travel and 50 nm repeatability
Substage with 20 mm travel and 100 nm repeatability
Substage with 20 mm travel
Substage with 10 mm travel